JPS6397232U - - Google Patents
Info
- Publication number
- JPS6397232U JPS6397232U JP19317386U JP19317386U JPS6397232U JP S6397232 U JPS6397232 U JP S6397232U JP 19317386 U JP19317386 U JP 19317386U JP 19317386 U JP19317386 U JP 19317386U JP S6397232 U JPS6397232 U JP S6397232U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- loader
- core tube
- furnace core
- shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 3
- 230000037431 insertion Effects 0.000 claims 1
- 238000003780 insertion Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19317386U JPS6397232U (en]) | 1986-12-15 | 1986-12-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19317386U JPS6397232U (en]) | 1986-12-15 | 1986-12-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6397232U true JPS6397232U (en]) | 1988-06-23 |
Family
ID=31148950
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19317386U Pending JPS6397232U (en]) | 1986-12-15 | 1986-12-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6397232U (en]) |
-
1986
- 1986-12-15 JP JP19317386U patent/JPS6397232U/ja active Pending